Phosphine CAS#7803-51-2
Important Semiconductor Application: Phosphine is widely used in the semiconductor industry as a doping material source, supporting advanced electronic material manufacturing processes.
High Chemical Effectiveness: With its unique chemical properties, phosphine provides effective performance in specialized industrial applications.
Agricultural Application Value: Phosphine is utilized as a pesticide in agricultural applications, contributing to pest control processes.
High-Purity Industrial Gas Utility: As a specialized chemical gas, phosphine serves important roles in industries requiring precise chemical processing and controlled applications.
Product Description of Phosphine CAS#7803-51-2
Phosphine (CAS#7803-51-2), with the chemical formula PH₃, is a highly toxic, flammable, and explosive gas. It is widely utilized in the semiconductor industry as a dopant source for material processing and is also applied in agriculture as a pesticide.
Due to its extreme toxicity and hazardous properties, phosphine requires strict handling and safety measures, as exposure to very low concentrations can pose serious health risks and may be fatal.
Key Specifications
| Parameter | Electronic Grade | Industrial Grade |
| Purity | ≥99.999% | ≥99.9% |
| O₂ Content | ≤0.5 ppm | ≤50 ppm |
| H₂O Content | ≤1 ppm | ≤10 ppm |
| Total Impurities | ≤10 ppm | ≤1000 ppm |
Product Usage
1. Semiconductor Manufacturing
Used as a doping gas source for n-type silicon, providing precise doping control with a uniformity variance of ≤0.1%.
Applied in MOCVD (Metal Organic Chemical Vapor Deposition) processes for the production of GaN-based LEDs.
2. Grain Fumigation
Used as a grain fumigant, achieving up to 99.9% pest mortality at a dosage of 2 g/m³ according to OECD Guideline 633.
Provides a low-residue alternative to methyl bromide for pest control applications.
3. Chemical Synthesis
Utilized as a catalyst in asymmetric hydrogenation reactions, including the synthesis of chiral pharmaceutical intermediates.
